about

the hacker fab at cmu is the first diy open source semiconductor fabrication lab. We design, build, document, and share DIY machines and processes to fabricate semiconductor devices in any room, for anyone with access to the internet.

here's what we've made.

patterning
photolithography projector
hardware

uses a standard projector DLP chip and microscope parts to expose custom patterns on the surface of a silicon chip

+ 2 µm features
+ <$2000 cost

build it
maskless photolithography
process

the use of a DLP projector allows for projection without the use of a physical mask, allowing high customization potential

+ 2 µm features
+ <$2000 cost

run it
nano stepper stage
hardware

patterning requires high precision small movements; this motion stage control x, y and z heights

+ 5 µm precision

build it
deposition
rf plasma sputtering
process

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+ high repeatability

run it
rf sputtering chamber
hardware

Sagittis interdum elit fermentum scelerisque enim est a tempor volutpat neque sollicitudin auctor. Euismod leo montes nunc aliquet curabitur a dignissim pharetra erat aenean bibendum.

+ 2 µm features
+ <$2000 cost

build it
atomic layer deposition
process

Sagittis interdum elit fermentum scelerisque enim est a tempor volutpat neque sollicitudin auctor. Euismod leo montes nunc aliquet curabitur a dignissim pharetra erat aenean bibendum.

+ 1 µm features
+ <$2000 cost

run it
ald chamber and controller
hardware

Sagittis interdum elit fermentum scelerisque enim est a tempor volutpat neque sollicitudin auctor. Euismod leo montes nunc aliquet curabitur a dignissim pharetra erat aenean bibendum.

+ 1 µm features
+ single layer deposition

build it
metrology
analog probing
process

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+ 2 µm accuracy
+ 5 steps

run it
devices
n-channel MOSFET
device

Sagittis interdum elit fermentum scelerisque enim est a tempor volutpat neque sollicitudin auctor. Euismod leo montes nunc aliquet curabitur a dignissim pharetra erat aenean bibendum.

+ 5x features
+ <$1000 cost

build it

The Hacker Fab is made possible through the generous support from industry partners and the Department of Electrical and Computer Engineering at Carnegie Mellon University.